Handbook of Micro and Nano Tribology P13

Chia sẻ: Hung Nhat | Ngày: | Loại File: PDF | Số trang:19

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Handbook of Micro and Nano Tribology P13

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With the proven record of accomplishment in very large integrated circuits (VLSI) brought about by batch-fabrication technology for electronic devices of ever-decreasing size, there is widespread enthusiasm about emerging opportunities to design mixed micromechanical and microelectronic systems. New development, based heavily on integrated-circuit-related technologies, have led to rapid progress in the development of

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