MEMS Mechanical Sensors

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MEMS Mechanical Sensors

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As with micromachining processes, many MEMS sensor-packaging techniques are the same as, or derived from, those used in the semiconductor industry. However, the mechanical requirements for a sensor package are typically much more stringent than for purely microelectronic devices. Microelectronic packages are often generic with plastic, ceramic, or metal packages being suitable for the vast majority of IC applications.

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Nội dung Text: MEMS Mechanical Sensors

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