Nano and Microelectromechanical Systems P2

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Nano and Microelectromechanical Systems P2

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A large variety of nano- and microscale structures and devices, as well as NEMS and MEMS (systems integrate structures, devices, and subsystems), have been widely used, and a worldwide market for NEMS and MEMS and their applications will be drastically increased in the near future. The differences in NEMS and MEMS are emphasized, and NEMS are smaller than MEMS. For example, carbon nanotubes (nanostructure) can be used as the molecular wires and sensors in MEMS. Different specifications are imposed on NEMS and MEMS depending upon their applications. For example, using carbon nanotubes as the molecular wires, the current density...

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Nội dung Text: Nano and Microelectromechanical Systems P2

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