Bulk micromachining

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  • Making devices small has long had engineering, scientific, and aesthetic motivations. For example, John Harrison’s quest [1] to make a small (e.g., hand-sized) chronometer in the 1700s for nautical navigation was motivated by the desire to have an accurate time-keeping instrument that was insensitive to temperature, humidity, and motion. A small chronometer could meet these objectives and allow for multiple instruments on a ship for redundancy and error averaging. A number of technological firsts came from this work, such as the development of the roller bearing.

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  • Within a period of a few decades, the ¯eld of materials science and engineering has emerged as a focal point for developments in virtually all areas of engineering and applied science. The study of thin film materials has been one of the unifying themes in the development of the ¯eld during this period. As understood here, the area encompasses ¯lms bonded to relatively thick substrates, multilayer materials, patterned ¯lms on substrates and free-standing ¯lms.

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  • Over many years, RF-MEMS have been a hot topic in research at the technology and device level. In particular, various kinds of mechanical Si-MEMS resonators and piezoelectric BAW (bulk acoustic wave) resonators have been developed. The BAW technology has made its way to commercial products for passive RF filters, in particular for duplexers in RF transceiver front ends for cellular communications. Beyond their use in filters, micromachined resonators can also be used in conjunction with active devices in innovative circuits and architectures.

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  • Micromechanical photonics is evolvingin interdisciplinary research and engineering fields and merging independently developed technologies based on optics, mechanics, electronics, and physical/chemical sciences. Manufacturing technologies such as those of semiconductor lasers, surface micromachining and bulk micromachiningare promotingtec hnology fusion.

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