Photolithography

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  • The fundamental aim of microengineering — to take a design from a computer aided design (CAD) software package and manifest it in a physical manner — may be achieved through one of a number of different fabrication or micromachining technologies. Many of these technologies employ a process known generally as photolithography , or a variation of this process, to transfer a two-dimensional pattern from a mask into the structural material.

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  • Tuyển tập báo cáo các nghiên cứu khoa học quốc tế ngành hóa học dành cho các bạn yêu hóa học tham khảo đề tài: Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography

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  • Tài liệu tham khảo Quang khắc và Kỹ thuật quang khắc (photolithography )...

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  • Quang khắc (photolithography) - là tập hợp các quá trình quang hoá nhằm tạo ra các chi tiết trên bề mặt phiến silicon có kích thước và hình dạng giống như thiết kế. Để làm được điều này cần phải có những bộ mặt nạ (mask), chất cảm quang (photoresist) nguồn sáng UV và dung dịch hiện hình (developer). Mặt nạ thường là một tấm thuỷ tinh hữu cơ được phủ một màng crôm trên đó khắc hoạ những chi tiết phù hợp với thiết kế của cảm biến hoặc mạch tích hợp (IC). ...

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  • Lithography, the fundamental fabrication process of semiconductor devices, is playing a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. Traditional optical lithography (photolithography) including contact and project photolithography has contributed significantly to the semiconductor device advancements.

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  • Less than twenty years ago photolithography and medicine were total strangers to one another. They had not yet met, and not even looking each other up in the classifieds. And then, nucleic acid chips, microfluidics and microarrays entered the scene, and rapidly these strangers became indispensable partners in biomedicine. As recently as ten years ago the notion of applying nanotechnology to the fight against disease was dominantly the province of the fiction writers.

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  • Kang et al. Nanoscale Research Letters 2011, 6:236 http://www.nanoscalereslett.com/content/6/1/236 NANO EXPRESS Open Access Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes Min-Seok Kang1, Sung-Jae Joo2, Wook Bahng2, Ji-Hoon Lee1, Nam-Kyun Kim2, Sang-Mo Koo1* Abstract In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma.

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  • Less than twenty years ago photolithography and medicine were total strangers to one another. They had not yet met, and not even looking each other up in the classifieds. And then, nucleic acid chips, microfluidics and microarrays entered the scene, and rapidly these strangers became indispensable partners in biomedicine. As recently as ten years ago the notion of applying nanotechnology to the fight against dis- ease was dominantly the province of the fiction writers.

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