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MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES

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MICROMACHINING TECHNIQUES FOR FABRICATION OF MICRO AND NANO STRUCTURES

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Making microsystems at a scale level of few microns is called micromachining. Micromachining is used to fabricate three-dimensional microstructures. It is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). MEMS usually consist of three major parts: sensors, actuators, and an associate electronic circuitry that acts as the brain and controller of the whole system.

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