Interferometry methods

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  • This book compiles recent studies on interferometry and its applications in science and technology. It is intended as an up-to-date reference of theoretical and experimental aspects of interferometry and their applications. The book is divided in two sections. The first one is an overview of different interferometry techniques and their general applications. Chapter 1 is concentrated on the classical field interferometry. This chapter describes and explains the structures of different type of fiber interferometers, and the standard methods for signal recovering....

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  • An overview of PTB’s activities in the field of dimensional nanometrology using scanning probe microscopes (SPMs) is presented. The chapter is divided into two parts: the development of (1) high-resolution probing systems and (2) complete SPM metrology systems. The subject of SPM-probing system design comprises, among other things, the concept of the “sensor objective” to combine conventional microscopy with scanning probe techniques.

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  • Different terms are employed in the literature to specify this method on investigations: dualbeam coherent interferometry or laser Doppler interferometry, optical coherence tomography (OCT) or optical coherence reflectometry. OCT is analogous to ultrasonic imaging, which measures the intensity of reflected infrared light rather than reflected sound waves from the sample. Time gating is employed so that the time for the light to be reflected back (or echo delay time) is used to assess the intensity of back-reflection as a function of depth.

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