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Subwavelength optical lithography

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  • Relentless assaults on the frontiers of CMOS technology over several decades have produced a marvel of a technology. The world we live in has been changed by complex integrated circuits now containing a billion transistors with line widths of less than 100 nm, fabricated in plants costing several billion dollars. This microelectronics revolution was made possible only through the dedication and ingenuity of many specialized experts with detailed knowledge of their crafts.

    pdf0p thix1minh 16-10-2012 49 5   Download

  • Manipulating light by subwavelength resonators via plasmonic metasurface is currently studied intensively for various novel THz and optical applications. In this report, we present the fabrication of a simple plasmonic metasurface operating at infrared frequencies using the UV lithography and electron beam evaporation techniques.

    pdf5p viengland2711 23-07-2019 2 0   Download

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