Nano and Microelectromechanical Systems P1

The development and deployment of NEMS and MEMS are critical to the U.S. economy and society because nano- and microtechnologies will lead to major breakthroughs in information technology and computers, medicine and health, manufacturing and transportation, power and energy systems, and avionics and national security. NEMS and MEMS have important impacts in medicine and bioengineering (DNA and genetic code analysis and synthesis, drug delivery, diagnostics, and imaging), bio and information technologies, avionics, and aerospace (nano- and microscale actuators and sensors, smart reconfigurable geometry wings and blades, space-based flexible structures, and microgyroscopes), automotive systems and transportation (sensors and actuators, accelerometers), manufacturing...