MINISTRY OF EDUCATION

VIETNAM ACADEMY

AND TRAINING

OF SCIENCE AND TECHNOLOGY

GRADUATE UNIVERSITY SCIENCE AND TECHNOLOGY 

NGUYEN THUY VAN

FABRICATION AND INVESTIGATION OF

CHARACTERISTICS OF PHOTONIC MICROCAVITY 1D

FOR OPTICAL SENSORS

Chuyên ngành: Materials for Optics Optoelectronics and Photonics

Code: 62.44.01.27

SUMMARY OF SCIENCE MATERIALS DOCTORAL THESIS

Hanoi - 2018

The thesis was completed at Key Laboratory for Electronic

Materials and Devices, Institute of Materials Science, Vietnam

Academy of Science and Technology.

Supervisors:

1. Assocc. Prof. Dr. Pham Van Hoi

2. Assocc. Prof. Dr. Bui Huy

Reviewer 1:

Reviewer 2:

Reviewer 3:

The dissertation will be defended at Graduate University of

Science and Technology, 18 Hoang Quoc Viet street, Hanoi.

Time:...........,............., 2018

The thesis could be found at:

- National Library of Vietnam

- Library of Graduate University of Science and Technology

- Library of Institute of Science Materials

9.

LIST OF PUBLICATIONS

LIST OF PUBLICATIONS USED FOR THE THESIS

1. Huy Bui, Van Hoi Pham, Van Dai Pham, Thanh Binh Pham, Thi Hong Cam Hoang, Thuy Chi Do and Thuy Van Nguyen, Development of nano-porous silicon photonic sensors for pesticide monitoring, Digest Journal of Nanomaterials and Biostructures, volume 13, No.1, January – March 2018.

2. H. Bui, V. H. Pham, V. D. Pham, T. H. C. Hoang, T. B. Pham, T. C. Do, Q. M. Ngo, and T. Van Nguyen, “Determination of low solvent concentration by nano-porous silicon photonic sensors using volatile organic compound method,” Environ. Technol., pp. 1–9, May 2018.

3. Van Hoi Pham, Huy Bui, Thuy Van Nguyen, The Anh Nguyen, Thanh Son Pham, Van Dai Pham, Thi Cham Tran, Thu Trang Hoang and Quang Minh Ngo, “Progress in the research and development of photonic structure devices”, Adv. Nat. Sci.: Nanosci. Nanotechnol. 7, 015003, 17pp, 2016.

4. Van Hoi Pham, Thuy Van Nguyen, The Anh Nguyen, Van Dai Pham and Bui Huy, “Nano porous silicon microcavity sensor for determination organic solvents and pesticide in water”, Adv. Nat. Sci.: Nanosci. Nanotechnol. 5, 045003, 9pp, 2014.

5. Bui Huy, Thuy Van Nguyen, The Anh Nguyen, Thanh Binh Pham, Quoc Trung Dang, Thuy Chi Do, Quang Minh Ngo, Roberto Coisson, and Pham Van Hoi, “A Vapor Sensor Based on a Porous Silicon Microcavity for the Determination of Solvent Solution”, Jounal of the Optical Society of Korea, Vol. 18, No. 4, pp. 301-306, 2014.

6. Van Hoi Pham, Huy Bui, Le Ha Hoang, Thuy Van Nguyen, The Anh Nguyen, Thanh Son Pham, and Quang Minh Ngo, “Nano- porous Silicon Microcavity Sensors for Determination of Organic Fuel Mixtures”, Jounal of the Optical Society of Korea, Vol. 17, No. 5, pp. 423-427, 2013.

7. Nguyen Thuy Van, Pham Van Dai, Pham Thanh Binh, Tran Thi Cham, Do Thuy Chi, Pham Van Hoi and Bui Huy, “A micro- photonic sensor based on resonant porous silicon structures for

liquid enviroment monitoring”, Proc. of Advances in optics Photonics Spectroscopy & application, Ninh Binh city, Vietnam. November 6 - 10, 2016, ISBN 978-604-913-578-1, pp. 471-475, 2017.

8. Phạm Văn Hội, Bùi Huy, Nguyễn Thúy Vân, Nguyễn Thế Anh, “Thiết bị cảm biến quang tử và phương pháp để đo nồng độ dung môi hữu cơ và chất bảo vệ thực vật trong môi trường nước” sáng chế số: 16527, cấp theo quyết định số: 5424/QĐ-SHTT, ngày 24.01.2017.

LIST OF PUBLICATIONS RELATED TO THE THESIS

1. Pham Van Dai, Nguyen Thuy Van, Pham Thanh Binh, Bui Ngoc Lien, Phung Thi Ha, Do Thuy Chi, Pham Van Hoi and Bui Huy, “Vapor sensor based on porous silicon microcavity for determination of methanol content in alcohol”, Proc. of Advances in optics Photonics Spectroscopy & application, Ninh Binh city, Vietnam. November 6 - 10, 2016, ISBN 978-604-913-578-1, pp. 404-408, 2017.

2. Nguyen Thuy Van, Nguyen The Anh, Pham Van Hai, Nguyen Hai Binh, Tran Dai Lam, Bui Huy and Pham Van Hoi, “Optical sensors for pesticides determaination in water using nano scale porous silicon microcavity ”, Proc. of Advances in Optics, Photonics, Spectrscopy & Applications VIII, ISSN 1859-4271, pp.603-608,2015.

3. Thuy Van Nguyen, Huy Bui, The Anh Nguyen, Hai Binh Nguyen, Dai Lam Tran, Roberto Coisson and Van Hoi Pham, “An improved nano porous silicon microcavity sensor for monitoring atrazine in water”, Proc. of The 7th International Workshop on Advanced Materials Science and Nanotechnology (IWAMSN2014)- November 02-06, 2014- Ha Long City, Vietnam, ISBN: 978-604-913-301-5, pp.173-179, 2015.

1

INTRODUCTION

1. The urgency of the thesis

In recent years, photonic sensors have generated an increasing

interest because of their already well-known advantages, as immunity

to electromagnetic interferences, high sensitivity, no impact noise

and working in harsh environment. Photonic sensors are generally

classified according to the physical principle including endogenous

sensors and exogenous sensors. Exogenous sensors often use the

physical principle that light is altered in intensity of spread; reflex;

scattering; refraction; or wavelength conversion due to interaction

with the external environment. These sensors are relative easiness of

fabrication, but the processing of light signals varies due to the

complexity of the external environment requiring high sensitivity.

The endogenous photonic sensor uses the physical principle that the

optical properties of sensor structure is changed when interacting

with the environment. Therefore, they have very high sensitivity,

easiness of signal processing and compact device size. However, the

disadvantage of endogenous photonic sensor is the ability to reuses

and selectivity. Endogenous photonic sensors are being promoted in

research because of their extremely high sensitivity which can be

combined with many specializations in chemistry and biology. At

present, the sensitivity and selectivity of endogenous photonic

sensors can be enhanced and have had some very good results.

In general, scientists and technologists have proposed the standard

approach of quantitative analysis of components with extremely

small concentrations by using gas chromatography or liquid

chromatography (GC / MS, LC / MS or HPLC / MS-MS) [1]-[4],

2

liquid chromatography combined with UV-Vis [5]. These methods

have played a key role in the analysis of residues of low organic

dissolved organic substances in the process of controlling or

controlling the environment. However, these methods suffer some

drawbacks since thay require professional laboratories with

specialized personel and expensive equipment.

In the field of electrochemical sensors [6-7], the enzyme-linked

immunosorbent assay (ELISA) has been developed for determination

of residues of organic matter based on the principle of antigen -

antibody. The ELISA technique has high sensitivity, easiness of

manipulation and rapid analysis time, so there are many models of

sensor devices using the ELISA principle. The disadvantage of the

ELISA approach is the low accuracy in harsh environment, inflexible

due to the dependence on the chemicals of the manufacturer. Thus,

finding new analytical methods is more convenient than the goal of

many sensing laboratories in the world.

Endothelial photonic sensors based on the principle of changing the

refractive index of the sensor environment due to the interaction with

environment are being extensively studied for the development of

sensors in the world. Principles of transmission, interference,

scattering and refraction of light is studied and applied radically in

the photonic sensor based on changing the refractive index of the

environment. The most recent publish reported that the optical fiber

Bragg grating is capable of detecting the refractive index change to as low as 7.2x10-6 in liquid environment [8]. which allows the

determination of solution at low concentration. Endothelial photonic

sensors based on the 1D – nanoporous silicon microcavity (1D-

NPSMC) have high sensitivity, low cost and ability to analyse

3

substances quickly and easily [9]. In recent years, scientists have

promoted research on endogenous photonic sensors for determining

concentrations of solvents, biological antibodies [10], cadavers

petroleum contamination norms and petroleum products [11],

determination of pesticide residues in water and sludge (recorded

pesticide concentration at 1 ppm) [12], determination of

concentration DNA level (0.1 mol / mm2 DNA concentration) [13],

chemical sensor [14]. Current trends in the development of

endogenous photonic sensors in the world are enhancing the

sensitivity of the sensor (down to ppm), the selectivity of close-

optical properties and portable sensor devices.

In addition, the nano porous silicon with different porosity have

different refractive indexes, so that the multilayer porous silicon can

easily form an optical resonance cavity with cost low, durable in the

environment for application in photonic sensor technology. The

research results show that photonic sensors based on resonant cavity

have the ability to measure the concentration of solvents and

pesticides in the aqueous medium at extremely low concentrations.

So that PSMC devices show promise for a simple and portable

instruments for measuring the level of water pollution caused by

organic solvents from industrial production or agricultural protective

substances. Based on the large surface area of the porous silicon, the

porous silicon material has become the ideal material for liquid and

vapor phase sensors. The principle of pSi-sensors is a determination

of the optical spectral shift caused by refractive index change of the

porous silicon layers in the device due to the interaction with liquid

and/or gas. The advantages of photonic sensors are highly sensitivity,

so that they are suitable for determination of organic solvents or

4

pesticides at low concentrations. Therefore, “Fabrication and

investigation of characteristics of photonic microcavity 1D for

optical sensors” has been selected as a research topic of the thesis.

2. The objectives of the thesis

i) Research and fabricate the one-dimensional (1D) – nanoporous

silicon microcavity (1D-NPSMC) structures by using electrochemical

etching method with the selectivity of wavelength in visible range

from 200 nm to 800 nm. The 1D-NPSMC structures has high

reflectivity, narrow linewidth of the pass-band and homogeneous

pores ii) Design the photonic sensor device based on 1D-NPSMC

structure which is capable of measuring in two modes: liquid phase

(used for determination pesticides) and vapor phase (used for

determination organic solvents) iii) Determinate the low

concentrations of pesticides and organic solvents in aqueous medium.

3. The main contents of the thesis

i) Research and fabricate 1D-NPSMC structures based on porous

silicon ii) Calculate and simulate optical characteristics of 1D-

NPSMC structures by using Transfer Matrix Method (TMM) iii)

Design the photonic sensor device based on 1D-NPSMC structure

which is capable of measuring in two modes: liquid phase (used for

determination pesticides) and vapor phase (used for determination

organic solvents) iv) Determinate the low concentrations of

pesticides and organic solvents in aqueous medium.

4. Thesis structure: This thesis consists of 148 pages: introduction,

five chapters in content, conclusion. The main results were published

5

on 06 articles was published on international journal, 01 presentation

at an international workshop and 01 patent.

Chapter 1: OVERVIEW ABOUT PHOTONIC MICROCAVITY

1D AND POROUS SILICON:

In this chapter, we introduce photonic crystals from the concept to

the structure of all 1D, 2D and 3D photonic crystals. Particularly, this

chapter details the structure of the 1D photonic resonator and the

formation of silicon by electrochemical etching method. The

advantages of silicon and its application in the field of sensing are

detailed in this chapter.

Chapter 2:

DESIGN AND SIMULATUION OF THE 1D MICROCAVITY

STRUCTURES BASED ON POROUS SILICON

This chapter describes the basic physics theory of one dimensional

photonic crystals and the transmission of optical waves in layered

media. The Kronig-Penny model is reviewed as a rigorous model for

one dimensional periodically layered dielectric media. Next, the

Transfer Matrix Method (TMM) is developed and its uses in

calculating the band gaps of the non-defect PhCs and the reflection

properties of defects introduced PhC structures are presented. This

simulation work explored the effect of the refractive indices

variation, the thickness of each layer and the number of layers on the

formation of band gaps and on resonant transmissions in 1-D PhC

microcavities. The obtained band gap was compared with the

6

simulation result based on the Kronig-Penny model, and the structure

parameters defined from the simulated reflection spectra laid the

foundation for the following fabrication work. Parameters affecting

the sensitivity of the optical sensor based on the 1D microcavity

structure on the silicon wafer are also detailed.

Chapter 3:

FABRICATION OF THE 1D – MICROCAVITY BASED ON

POROUS SILICON

3.1. Principle, process of fabrication of the 1D microcavity based

on porous silicon

3.1.1. Fabricating principles

This part introduces the principle of fabricating 1D microcavity based

on porous silicon by using electrochemical etching method.

3.1.2. Process of fabricating 1D microcavity structure

This section details the steps of fabrication of 1D microcavity

structure.

3.2. Design and fabrication of 1D microcavity structure

The microcavity structure

consists of two parallel

reflectors separated by a

spacer layer. Usually the

reflectors used are λ/4 DBR

with optical thickness of the

layers λ/4. The optical

thickness of the spacer layer

can be either λ or λ/2.

Porous silicon

layers.

microcavities are formed

Figure 3.5. (a) Schematic illustration of microcavity structure represented by a half-wave optical thickness defect layer between two Bragg mirrors. The Bragg mirrors consist of alternating layers of high and low refractive index quarter-wave optical thickness (b) Reflectance spectrum of microcavity. The defect layer introduces a narrow resonance in the middle of the high reflectance stopband.

7

by first etching a top Bragg mirror with alternating quarter

wavelength optical thickness layers of low and high porosities (high

and low refractivve indices, respectively), then etching a half

wavelength optical thickness defect layer with the same refractive

index as the high porosity mirror layers, and finally etching a bottom

Bragg mirror with the same conditions as the top mirror. Detailed

electrochemical etching conditions are provided in Table 3.1.

The characteristics of the microcavitity structures were determined

by field-emission scanning electron microscopy (FE-SEM; S-4800)

and the reflectance spectra of samples were studies by a UV-VIS-

NIR spectrophotometer (Varian Cary-5000) and USB 4000

spectrophotometer.

3.3. Some methods of studying the structure and optical

properties of porous silicon materials

The optical properties and quality of the 1D photonic resonator

structure depend greatly on the size of the porous holes, the thickness

of the layers. Therefore, the identification of these factors is of

particular importance in understanding the relationship between the

structure and optical characteristics of microcavites made of silicon.

In this section, we present some of the methods used in this thesis to

observe the morphology, size, structure and optical characteristics of

1D microvities such as scanning electron microscopy SEM, Metricon

Prism 2010 Model, Varian Carry 5000 Spectrum Analyzer, USB

4000

3.4. The 1D microcavity structures Table 3.3. Parameters of fabrication of 1D-PCs structure in visible range with 12 periods

8

Sample Layers Periods Time (s)

M03 12 nH nL Current Density (mA/cm2) 15 50 4,47 2,3

Figure 3.18

shows FE-

SEM

images of

the 1D-PC

in the

visible range

Figure 3.18. FE-SEM images of the 1D-PC in the visible range with 12 periods

with 12

periods. Figure 3.19

presents the reflection

spectra of 1D-PC structure

in visible range.

Detailed

electrochemical etching

conditions of microcavity

structure in visible range.

are provided in Table 3.4. The

porous silicon microcavities

Hình 3.19. The reflection spectra of 1D-PC structure in visible range at 608 nm centre wavelength.

used in this thesis typically

consist of 4.5/5 period upper/lower Bragg mirrors. Each period

consists of one low porosity and one high porosity layer. Therefore, a

half period means that there is an additional low porosity layer

formed. Increasing the naumber of mirror periods enables higher Q-

factor microcavities.

9

Bảng 3.4. Electrochemical etching conditions for a porous silicon microcavity at 650 nm resonant wavelength

Descriptionả Period Etching time (s)

Current density (mA/cm2) 15 5,16 4 50 2,65 DBR1

15 5,16 1

Spacer layer 50 5,31 1

DBR2 15 5,16 5 50 2,65

Figure 3.20 shows

cross-section and plan-

view images of the

microcavity based on (HL)4.5LL(HL)5 porous

silicon multilayer

structure, where H and L

labels correspond to

Figure 3.20. (a) Cross-section and (b) SEM plan-view images of a porous silicon microcavity design in the (HL)4.5LL(HL)5.

Figure 3.23. The reflection spectrum of 1D microcavity structure at 654 nm resonant wavelength.

Figure 3.23. 04 samples of microcavity structure in the visible range

10

high and low refractive index layers, respectively, 4.5 and 5.0 mean

four and half and five pairs of HL, because this gives a good

reflectivity spectrum, possibly controlling the porosity of layers, and

easily repeatable electrochemical etching method. Figure 3.23

presents images of 4 microcavity structure samples in the visible

range.

3.5. Design of photonic sensor device based on 1D-porous silicon

microcavity

Figure 3.34 is a block diagram of a photonic sensor device used in a

thesis including a liquid method (application of non-volatile

analytical substance) and vapor organic compounds (application for

volatile compounds).

Figure 3.26. The schematic of photonic sensor device

Hình 3.23. Phổ phản xạ của cấu trúc vi cộng hưởng quang tử 1D sau khi chia cho cường độ phản xạ của mẫu nền.

of

3.28.

Schematic

Figure 3.27. Schematic of the pesticide concentration measurement by liquid-drop method using the porous silicon microcavity sensor.

the Figure concentration measurement for VOC using a sensor based on the porous silicon microcavity

11

Figure 3.33. Overall drawing of equipment and sensor systems

Figure 3.29. The image of photonic sensor device

Chapter 4:

DETERMINATION OF PESTICIDE RESIDUES IN

AQUATIC ENVIRONMENT BASED ON POROUS SILICON

MICROCAVITIES 4.1. Principle of optical sensing

Principle of

interferometric

transduction is used, in

which the molecular

recognition events are

converted into optical

Figure 4.1. Schematic Diagram of Sensor Principle

signals via the change of

the refractive index. As

shown in the schematic

diagram (Fig. 4.1), light

reflected from the top

interface (air-PS) and

bottom interface (PS-Si

substrate) interfere with

Figure 4.2. Wavelength shift in the reflectance spectra of sensor device before and after analyte substance absorption

12

each other and form the typical Fabry-Perot fringes in the reflectance

spectrum.

For bare 1D-NPSMC structure (without any analyte), the refractive

index of the structure is n. When the pores are filled with an analyte

(e.g., chemicals or bio-chemicals), the effective refractive index of

the structure increases from n to n+Δn with shift in wavelength from

λ+Δλ in the reflectance spectra due to increased optical thickness of

the structure. Hence, by analyzing the wavelength shift in the

reflectance spectra, capture and detection of the analyte is done.

Figure 4.2 shows principle of optical sensing based on porous silicon microcavity.

4.2. The optical sensing applications based on the 1D- nanoporous silicon microcavity

For converting the surface of

the silicon nano-crystals from

hydrophobic to hydrophilic, the

as-prepared sample was oxidized

in an ozone atmosphere for 45

min by using the ozone generator

(H01 BK Ozone with a capacity

of 500 mg/h). Futhermore, the

controlled process of pSi oxidation

Figure 4.3. The reflection spectra of the microcavity before (curve 1) and after oxidization (curve 2)

improved the durability of skeletal

structure and for long life time of ageing pSi. Figure 4.3 shows the

reflection spectra of the microcavity before and after oxidization. The

reflection spectra were carried out on a spectrometer (USB-4000,

Ocean Optics) and a halogen light source (HL-2000 Ocean Optics).

The blue shift of the resonant wavelength after oxidization is due to a

13

decrease in the effective index of the porous layers in the

microcavity.

4.3. Determination of solvent solutions using 1D-nano porous silicon microcavity

4.3.1. Characteristics of liquid-phase photonic sensors

Table 4.1. Various organic solvents with known refractive index and resonant wavelength of sensors based on porous silicon microcavity dipped in corresponding solvent

Refractive Resonant Organic solvent index wavelength (nm)

Air 1.0003 504.75

Methanol (99.5%) 1.3280 572.05

Ethanol (99.7%) 1.3614 579.00

Isopropanol (99.7%) 1.3776 583.17

592.85 Methylene chloride (99.5%) 1.4242

Sensitivity (Δλ/Δn) is one of the most important parameters to

evaluate the performance of the sensors. Using the experimental data

in Table 1, we calculate the sensor sensitivity of about 200 nm/RIU.

The Spectrophotometer Varian Cary 5000 is able to detect a

wavelength shift of 0.1nm, corresponding to the minimum detectable

refractive index change in the porous silicon layer of less than 10 -3 .

Experiment shows that after complete evaporation of organic solvent,

the reflectance spectra of the sensors return to their original

waveform positions (as in the air). In our case the evaporation of

organic solvents in open air at room temperature was carried out for

40-50 minutes, but this process can occur in 20 seconds when the

samples are in a vacuum chamber with 10 -1 torr. That means, the

14

change of sensor reflectance spectra are temporary, and it is useful

for reversible optical sensing..

4.3.2. Determination of concentrations of organic solvents in the gasoline

The microcavity-

based sensors have

been applied to

determination of

different solutions of

ethanol and methanol

in the commercial

gasoline A92. Figure 4

shows the measured

results of the resonant

wavelength shift of the

Figure 4.8. Response characteristics of the sensor wavelength shift for mixture of methanol and ethanol in different concentrations and commercial gasoline A92.

microcavity sensor

immersed into gasoline

A92 with different concentrations of ethanol and methanol. In the

case of a mixture of ethanol/A92, a resonant wavelength shift is 3.6

nm, when ethanol concentration changed in the range from 5% to

15% in the gasoline. With the sensitivity of the sensor as described

above, the minimum determination of ethanol concentration change

in the gasoline is about 0.4%. In the case of methanol/A92,

wavelength shifts are 7.2 nm between the 5% and 15% methanol

mixtures,. From these experimental data, we suppose that the

enhanced sensor can distinguish change of about 0.2% in

concentration of methanol in the gasoline.

15

4.4. Determination of pesticides residues in the aquatic environment

Figure 4.9 demonstrates

the reflection spectra of

pSi-microcavity sensor in

the air and in pure water.

The wavelength shift

measured by spectrometer

USB-4000 is of 39.8 nm in

water and this value is

kept for referent data of

Figure 4.9. The reflection spectra of pSi-microcavity sensor in air (curve 1) and in pure water (curve 2). Inset: Image of pSi-sensor with surface area of about 0.8 cm2.

used sensor for liquid-

measurement

drop method.

Fig.4.11 shows a linear relation

between the different concentrations

of atrazine and the wavelength shift.

Each experimental point was the

average on five independent

Figure 4.11. Peak shift of PSMC as a function of Atrazine concentration in both aqueous and humic solutions

measurements, error bar the

representing standard the

deviation. The calibration plot of

obtained sensor device indicates a

good and linear response to

atrazine within the concentration

range from 2 to 22 pgmL-1. We

could calculate the sensitivity of the

Figure 4.12. Wavelength shift of pSi-sensor as a function of atrazine concentration in water and humic acid solutions at different times

16

sensor device as the slope of the linear curve interpolating the

experimental points. Thus, we obtained the value of 0.3 and 0.6

nm/pgmL-1 for Atrazine queous and humic solution, respectively.

From these numbers, we also estimated the limit of detection (LOD),

as the ratio between the instrument resolution and sensitivity. LOD

numerical value is 1.4 and 0.8 pgmL-1 for Atrazine queous and

humic solution, respectively. Also, it was observed that the higher

wavelength shift was observed in the case of atrazine in HA because

atrazine with HA contains dissolved organic matter as component

which have higher refractive index compare to water.

Fig. 4.13 presents the

results of detection of α-

and β- endosulfan

concentration in water.

The endosulfan of α- and

β- isomers can be

specified by the different

slope of the dependence

between wavelength

shift and endosulfan

concentrations. The LOD

Figure 4.13. Wavelength shift of pSi-sensors as a function of α- and β-endosulfan concentrations in water

of pSi-sensor is obtained of 0.32 µg.mL-1 and of 0.21 µg.mL-1 for α- and β-endosulfan,

respectively. This LOD is still low level of detection in comparison with gas chromatography method [25] (about 0.12 - 0.15 ng.mL-1),

but the pSi-sensor method has advantage in the low cost, simple

sample preparation process and that is suitable for detection of

endosulfan in the out-door field work.

17

Chapter 5

DETERMINATION OF SOLVENT CONCENTRATION BY

USING 1D NANO-POROUS SILICON PHOTONIC SENSORS 5.1. Experimental setup for VOC method

5.1.1. Theoretical basis

The capillary deposition of vapour in the pores which caused an

increase in the effective refractive index of the porous layer and a

shift of the reflection spectra of the sensor is represented by the

following Kelvin equation:

(5.1)

where γ, M, and ρ are the surface tension, molecular weight and density of vapour molecules, respectively, P is the observed vapour pressure, and P0 is saturation vapour pressure of analyte, R is ideal gas contant, TSe is the temperature of the sensor chamber, rK is the Kelvin radius that characterizes the process of capillary deposition.

5.2. Determination of solvent concentration by VOC method

Table 5.1. Some relevant physical-chemical properties of organic solvents used in

sensing experiment

Substances

n

ρ (g/cm3)

VP (kPa)

BP (0C)

Ethanol

1,3614

0,785

5,9

78,5

Methanol

1,3284

0,791

12,8

64,6

Acetone

1,3586

0,791

24

56,2

Water

1,3330

0,998

1,75

100

18

5.2.1. The dependence of the sensor response on temperature of

the solution and velocity of the air stream flowing through the solution

Figure 5.4. The dependence of the wavelength shift on the airflow velocity in the range 0-2.5ml.s-1.

Figure 5.3 shows the

dependence of the resonant

wavelength shift Δλ(C) on

Figure 5.3. The dependence of the wavelength shift on ethanol concentration when the velocity of air flow (V) and temperature of solution (T) work as parameters in the measurements. The curves 1-3 received from measurements with pairs of these parameters such as V= 0.84ml.s-1 and T=30℃, V=0.84 ml.s-1, T=45℃, V=1.68ml.s-1 and T=30℃, respectively.

ethanol concentration, when

velocity of the airflow (V) and temperature of the solution (T) work

as parameters in the measurements. It can be seen in Figure 5 that the

curve described by Δλ(C) is linear and its slope, i.e. sensitivity of the

measurement, increases as V and T increase.

Figure 5.4 shows the dependence of Δλ on V, Δλ (V), at a temperature of 300C when concentration of ethanol and acetone work

as the parameters. It can be seen in Fig. 6 that curves describing Δλ

(V) are separate straight lines with different concentrations of acetone

and ethanol. This shows that empirical function ϑ (V) is a linear

function of V.

19

5.2.2. Comparative sensitivity of the three methods (volatile

organinc compound (VOC), liquid drop and saturated vapour

pressure)

Parameters TSo and V had been changed from 30oC to 100oC and

from 1.68 mL.s-1 to 2.22 mL.s-1, respectively.

Figure 5.4. The dependence of the resonant wavelength shift (a), Δλ, and the sensitivity (b), S, on the volume concentration of ethanol in water, C, from the liquid, saturated vapour pressure and VOC measurements when solution temperature, T, and velocity of the air flow, V, work as parameters

Fig. 5.4 shows the dependence of the resonant wavelength shift, Δλ,

and the sensitivity, S, on the volume concentration of ethanol in

water, C, from the liquid drop, saturated vapour pressure and the

VOC methods when solution temperature, TSo, and velocity of the air

flow, V, work as parameters. Among those, the VOC method

provides the highest sensitivity at low solvent volume concentrations

because it can create a high vapour pressure of the analyte on the

sensor surface owing to the capillary deposition of organic solvent

into the silicon pores.

5.3. Determination of methanol content in alcohol based on 1D- NPSMC

20

5.3.1. Determination of methanol concentrations in alcohol

The prepared solution samples

to simulate contaminated

beverages (for example, vodka)

with total alcohol content of

30% v/v (CE = 30%) and of

45% v/v (CE = 45%).

Contamination was simulated by

adding methanol to the samples

in proportions ranging from 0 to

5% v/v. shows the

Fig. 5.8

dependence of the wavelength shift,

Δλ, on methanol concentration, Cm,

Figure 5.8. Dependence of wavelength shift on methanol concentration in the drinking alcohol with ethanol concentration of 30% and 45%v/v at the temperature of sensor chamber TSe= 22oC and the temperature of solution changed.

in 45% and 30% alcohol at sensor

temperature of 22 oC when the solution temperature, Tso, works as a

parameter. Note that the dependence of the wavelength shift on

methanol concentration can be described as a linear curve whose

slope increases with the concentration of ethanol in solution and the

solution temperature. Normally, with the increase of pressure, the

curve describing the dependence of the wavelength shift on vapor

pressure shows alternately the low slope in the mechanism of

physisorption, the high slope in the capillary deposition and then the

significantly reduced slope in the wetting regime [13]. In our case,

the relatively large wavelength shift at methanol concentration of 0%

shows that the capillary deposition has occurred at the solution

temperature from 45o to 55oC for both ethanol solutions. Working in

the capillary deposition, response of sensor is linear in the narrow

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range of concentrations. It is evident that the sensitivity calculated as

slope of the curve interpolating the experimental points is

proportional to the solution temperature.

Fig. 5.9 depicts the dependence

of the wavelength shift, Δλ, on

methanol concentration, Cm, in

the ethanol-water at the solution temperature of 550C when the

temperature

sensor TSe decreased from 28 to 140C.

Obviously, curves from 1 to 7

describing the dependence of Δλ on

linear and their slope Cm are

increases with the increase of the

Figure 5.9. The dependence of the wavelength shift on methanol concentration in 45% and 30% alcohol at the solution temperature of 550C when the sensor temperature, TSe, works as a parameter

concentration of ethanol in solution

and with the decrease of the sensor

temperature. In curve 8, the response of sensor is linear for methanol

concentrations lower than 3% and then the shift increases slowly with

concentration until saturation at about 5%. At this concentration, as

mentioned above, the sensor works in the wetting regime with a

significant reduction in sensitivity.

5.3.2. Determination of methanol and ethanol in industrial alcohol

At present, there are many types of counterfeit wine mixed with industrial alcohol with high methanol content. These counterfeit drinks cause poisoning to drinkers that can lead to death. Therefore, the purpose of this section is to determine the content of methanol contained in vodka prepared from industrial alcohol. As in the

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previous section, I have examined the methanol content in alcohol

with the known ethanol concentration. Therefore, in this section I conduct the experimental steps as follows: first I determined the ethanol content in industrial alcohol, then I mixed this industrial alcohol into two types of alcohol with ethanol concentration corresponding to the concentration ethanol surveyed the previous section, followed by the vaporization of organic compounds to determine the methanol content of the two types of alcohol.

Thus, it can be concluded that the method of vaporizing organic

compounds can be fully applied to determine the methanol content

found in alcoholic beverages based on industrial alcohol. With this

varnish, I determined a methanol concentration of 7.3% with an

alcohol content of 91% v / v. This is also an important result, opening

up a way to allow us to control the spirits that are circulating in the

market using optical sensors based on spongy silicon. Vaporization

methods of these organic compounds have very high sensitivity and

are capable of detecting solvents at very low concentrations.

Figure 5.11. The dependence of the wavelength shift on ethanol concentration in industrial alcohol

Figure 5.13. The dependence of the wavelength shift on methanol concentration in 45% and 30% alcohol and methanol concentration in 45% and 30% industrial alcohol.

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CONCLUSION

The thesis has focused on the study and fabrication of 1D - NPSMC for optical sensor. From the results obtained, the thesis can conclude with the following main points:

1. One dimensional (1D) – nanoporous silicon microcavity (1D- NPSMC) structures were successfully fabricated by electrochemical etching of p-type Si wafer (<100>, 0.01-0.03 Ωcm, 625 µm. The 1D- NPSMC structures has the selectivity of wavelength in visible range with the sharp photonic resonance dip centred at 650 nm.

2. The photonic sensor device based on 1D-NPSMC structure was successfully designed for determination of organic solvents and pesticides in liquid environment. The photonic sensor device is capable of measuring in two modes: liquid phase (used for determination pesticides) and vapor phase (used for determination organic solvents).

3. In case of liquid phase, the photonic sensor device is used for determination of low concentration of atrazine and alpha (α); beta (β) isomer endosulfan concentration in aquatic environment. The limit of detection (LOD) of sensors is of 1.4 pg.mL-1, 0.32 µg.mL-1 and 0.21 µg.mL-1 for atrazine and α- and β-endosulfan, respectively. Experiment shows that atrazine’s half-life in the aqueous phase ranges from 60 to 150 days in the humic acid and/or water, respectively. These pSi-sensors can contribute to the detection of persistent pesticides in the aqueous medium with short measuring time and high sensitivity for improving agricultural and food productions with sustainable environmental protection.

its particular boiling the solution with 4. In case of vapor phase, the photonic sensor device is used for determination of organic solvents in liquid environment by using volatile organic compound (VOC) method. The VOC method provides the highest sensitivity at low solvent volume concentrations because it can create a high vapour pressure of the analyte on the sensor surface owing to the capillary deposition of organic solvent into the silicon pores. This VOC method consists of three steps: heating temperature, controlling the flowing gas through liquid and cooling sensor. It

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delivers the highest sensitivity of 6.9 nm/% at concentration of 5% and the limit of detection (LOD) of pSi-sensor is 0.014% in case of ethanol in water when using an optical system with a resolution of 0.1 nm. Especially, the VOC method is capable of detecting low volume concentration of methanol in two tested ethanol solutions of 30% (v/v) and 45% (v/v) with the LOD of pSi-sensor up to 0.01% and 0.04%, respectively. This result will help pave a way to control the quality of contaminated liquor beverages.

5. In particular, the volatile organic compound method is capable of detecting low concentrations with high sensitivity of organic solvents (from 0-5% v/v methanol in alcohol) when cooling the sensor chamber. Based on this method, it is possible to determine the content of methanol contained in wines and counterfeit liquors manufactured from industrial alcohol. This result opens a new way to control the quality of alcoholic beverages using nanofiber silicon photon sensors..