RF MEMS and Their Applicatio P1

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RF MEMS and Their Applicatio P1

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During the past decade, several new fabrication techniques have evolved which helped popularize microelectromechanical systems (MEMS), and numerous novel devices have been reported in diverse areas of engineering and science. One such area is microwave and millimeter wave systems. MEMS technology for microwave applications should solve many intriguing problems of high-frequency technology for wireless communications. The recent and dramatic developments of personal communication devices forced the market to acquire miniaturized efficient devices, which is possible only by the development of radio frequency (RF) MEMS....

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