Effect of Sr content on microstructure and electrical properties of lead-free Ba1-xSrxTiO3 thin films

Lead-free barium titanate based Ba1-xSrxTiO3 thin films (x = 0 ÷ 0.45) have been deposited onto Pt/Ti/SiO2/Si(100) substrate via sol–gel technique. The films were crystallized at temperature of 650 °C for 30 min in the air. The experimental data displayed that microstructure, dielectric and ferroelectric properties of the films were strongly influenced by the Sr concentration.