Design and Implementation of
VLSI Systems
Lecture 03
Thuan Nguyen
Faculty of Electronics and Telecommunications,
University of Science, VNU HCMUS
Spring 2011
1
LECTURE 03: CMOS FABRICATION
2
Fabricating One Inverter
1
Layout & Design Rule Check
2
Stick Diagram
3
Euler path
4
LECTURE 03: CMOS FABRICATION
3
Fabricating One Inverter
1
Layout & Design Rule Check
2
Stick Diagram
3
Euler path
4
4
REVIEW
n+
p
GateSource Drain
bulk Si
SiO2
Polysilicon
n+ Body
SiO2
n
GateSource Drain
bulk Si
Polysilicon
p+ p+
nMOS pMOS
WAFER PREPARATION
5