3D finite element simulation and experimental validation of eddy current displacement sensor

In this paper, we simulated an eddy current sensor coil and investigated its impedance response in different scenarios using Ansys software. The experimental findings were consistent with the simulation results. For operating frequency at 180 kHz, comparison between simulation results and experimental using LCR meter and LDC1000EVM module results, the mean absolute percentage error were about 0.75% and 0.6%, respectively.