Electron beam evaporation techniques

Manipulating light by subwavelength resonators via plasmonic metasurface is currently studied intensively for various novel THz and optical applications. In this report, we present the fabrication of a simple plasmonic metasurface operating at infrared frequencies using the UV lithography and electron beam evaporation techniques.

5p viengland2711 23-07-2019 7 0   Download