Local sensitivity analysis for geometrical parameters of micro beams in MEMS using ANSYS Workbench

This paper presents a simulation method to determine the local sensitivity of geometrical parameters of the micro-beam models used in the micro-mechanical structures. The analysis allows for defining the essential parameters in designing the microstructures to reduce the designing time. The analysis results can be used to give suitable geometrical parameters for the micro-mechanical structure according to the purposed resonant frequency.