SEMICONDUCTOR SAFETY HANDBOOK

It is hard to imagine that less than fifteen years ago building and fire codes specific to the construction of a wafer fabrication facility were just in the process of being developed. Detection and evaluation of leaking underground storage tanks and epidemiological health studies aimed at qualifying and quantifying our “cleanroom” image were in their infancy stages and Cal- OSHA had just completed the first in-depth study of the industry’s chemical processes and associated industrial hygiene exposures....