Diamond dressing process

This paper aims to apply a kinematic model and then propose a method for setting speeds for diamond dressing process on the current configuration of CMP tool.

8p lucastanguyen 01-06-2020 4 1   Download

This paper proposes a novel view to predicting the distribution of pad cutting rate (PCR) and surface roughness based on cutting length and overlap cutting locus. The geometrical model of diamond dressing on the pad has been built and CMP tool parameters are used for the simulation of cutting length and overlap distribution. The distribution of PCR and predict surface roughness is calculated on each pad zone. Simulation results presented a high PCR and roughness is observed in center zones.

9p angicungduoc3 22-03-2020 9 0   Download

This paper describes the fundamentally quasi-orthogonal diamond dressing process by pyramid single-point diamond tools at different grit angles under the fixed down pressure and slow dressing speed for elastomer pad conditioning.

11p 12120609 19-03-2020 28 0   Download