Micro electromechanical systems

Free vibration of a silicon microbeam in micro-electromechanical systems (MEMS) subjected to electrostatic and axial forces is studied in the framework of a sinusoidal shear deformation theory. A nonlinear finite element formulation based on the von Kármán nonlinear assumption and the modified couple stress theory (MCST) is formulated and employed to establish the discrete nonlinear governing equations for the microbeam.

13p viannee 02-08-2023 7 3   Download

The objective of this thesis was to investigate the development of a micro-electromechanical system (MEMS) which can be implanted in the eye to provide continuous monitoring of glaucoma conditions. Current glaucoma monitoring involves taking laboratory based intra ocular pressure (IOP) measurements. The measurement of intraocular fluid flow and IOP parameters related to blockage formation in the eye require to be continuously monitored in Glaucoma.

153p runthenight07 01-03-2023 2 2   Download

In this paper, an attempt is made to apply an almost new optimization tool, i.e. differential search algorithm (DSA) for parametric optimization of three EMM processes. A comparative study of optimization performance between DSA, genetic algorithm and desirability function approach proves the wide acceptability of DSA as a global optimization tool.

14p toritori 11-05-2020 11 0   Download

Micro electromechanical systems (MEMS) based capacitive pressure sensor for ultral-low pressure using graphene has been proposed. The characteristics of sensor such as membrane displacement, capacitance and sensitivity of sensor with external pressure effect are simulated and analyzed using Comsol Multiphysics software. The obtained results show that the MEMS capacitive pressure sensor using 3, 5, 7-layer graphene exhibits the sensitivity of 230.8 aF/Pa, 174.4 aF/Pa and 144.4 aF/Pa, respectively.

6p hvdungcdcn12 26-11-2018 53 1   Download

the author presents a concise overview of topics that is enhanced by real world applications. this book is a survey of the foundations of electrical engineering, and emphasizes principles of circuits, electronics, systems and electromechanics for electrical engineers.

144p bautroibinhyen21 14-03-2017 62 5   Download

(bq) part 1 book "mechantronics an introduction" has contents: what is mechatronics; mechatronic design approach; system interfacing, instrumentation, and control systems; microprocessor based controllers and microelectronics; an introduction to micro and nanotechnology; modeling electromechanical systems,... and other contents.

120p bautroibinhyen18 21-02-2017 67 3   Download

Accordingly, PhC devices in SOI are realized by creating a lattice of air-holes in silicon, which can by achieved by anisotropic etching, of a high resolution patterned surface, into the silicon device layer (top layer of the SOI wafer). The refractive-index modulation, depth, and length of the device are the main parameters that are used to determine the optical properties of devices based on a photonic bandgap. Thus, stringent control of these parameters necessitates high-resolution lithography and high-aspect-ratio etching.

7p quynho77 13-11-2012 40 2   Download

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.

241p nhatro75 16-07-2012 109 39   Download