Piezoresistivity

The main contents of this chapter include all of the following: Capacitive sensors, resistive sensors, magnetic sensors, hall – effect sensors, piezoelectric transducers, strain gauges, piezoresistive sensors, optical sensors, ultrasonic transducers, nuclear sensors, microsensors.

46p youcanletgo_04 17-01-2016 42 2   Download

One of the important contributions of this thesis is that a hierarchical MEMS design synthesis and optimization process have been developed for and validated by the design of a specific structure of MEMS based accelerometer.

126p tamynhan0 04-07-2020 16 7   Download