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Reliability of mems

Xem 1-20 trên 22 kết quả Reliability of mems
  • Lecture Software engineering II: Lesson 30 - Fakhar Lodhi. The main topics covered in this chapter include: statistical software quality assurance, incomplete or erroneous specifications (IES), misinterpretation of customer communication (MCC), error index (EI), software reliability,...

    ppt13p youzhangjing_1909 28-04-2022 7 1   Download

  • Lecture Software engineering II: Lesson 31 - Fakhar Lodhi. The main topics covered in this chapter include: software availability, software safety, reliability versus safety, Poka-yoke – developed and Poka-yoke devices – mechanisms, characteristic of a Poka-yoke device,...

    ppt9p youzhangjing_1909 28-04-2022 8 1   Download

  • Ultrathin silicon nitride SiNx membrane suspended on a silicon wafer is a popular twodimensional platform in MEMS applications. The unsupported membrane has a low thermal conductivity, is electrically insulated, and very robust against mechanical impact. Remarkably thin, it is difficult to fabricate and manipulate. Recently equipped with a dual chamber system for plasma enhanced chemical vapor deposition (PECVD) and reactive ion etching, we calibrate it to deposit silicon nitride Si3N4, silicon dioxide SiO2, and to dry etch these materials.

    pdf8p nguaconbaynhay11 07-04-2021 8 1   Download

  • Lecture Building reliable component-based systems - Chapter 2: Specification of software components. This chapter presents the following content: Current component specification techniques, specifying the semantics of components, specifying extra-functional properties of components.

    ppt30p abcxyz123_04 30-03-2020 12 0   Download

  • Lecture Building reliable component-based systems - Chapter 2: Specification of software components. This chapter presents the following content: Current component specification techniques, specifying the semantics of components, specifying extra-functional properties of components.

    ppt28p abcxyz123_04 30-03-2020 12 0   Download

  • This chapter presents the following content: The role of software architecture, designing software architectures, architecture-driven component development, component-driven architecture development.

    ppt39p abcxyz123_04 30-03-2020 12 0   Download

  • This chapter presents the following content: Introduction, general issues of semantic concern, levels of formalism for semantic specifications, phases in a component’s life, a taxonomy for component semantics.

    ppt18p abcxyz123_04 30-03-2020 9 0   Download

  • Lecture Building reliable component-based systems - Chapter 7: Role-based component engineering. In this chapter, the following content will be discussed: Role-based components, motivating the use of roles, role technology, frameworks and roles.

    ppt28p abcxyz123_04 30-03-2020 14 0   Download

  • Lecture Building reliable component-based systems - Chapter 8: Dispelling the myth of component evaluation. In this chapter, the following content will be discussed: Introduction, multi-criteria evaluation, exploding the myth of component evaluation, multi-attribute evaluation and beyond.

    ppt18p abcxyz123_04 30-03-2020 9 0   Download

  • In this chapter, the following content will be discussed: Introduction, Characteristics and challenges of real-time systems, real-time component models, designing component-based real-time systems, composition of components, example: RT components in rubus OS.

    ppt34p abcxyz123_04 30-03-2020 12 0   Download

  • In this chapter, the following content will be discussed: Introduction, windows NT as a real-time OS, real-time features of windows NT, observations and recommendations, windows NT in a real-time setting, Summary.

    ppt20p abcxyz123_04 30-03-2020 7 0   Download

  • In this chapter, the following content will be discussed: Introduction, component technology in embedded systems, case study – ABB’s field devices, prerequisites for effective development of component-based embedded systems.

    ppt28p abcxyz123_04 30-03-2020 11 0   Download

  • In this chapter, the following content will be discussed: Component-based approach: reuse, integration, reuse of components not originally designed as reusable components, reuse of application patterns; level of integration can be chosen basic integration reusing the applications “as is”, data level (using relational database connector), implementation in COM.

    ppt28p abcxyz123_04 30-03-2020 11 0   Download

  • In this chapter, the following content will be discussed: The design of a powerful component model is shown to be a complex task, the model has improved progressively over the years, very large systems must live with inconsistencies.

    ppt18p abcxyz123_04 30-03-2020 9 0   Download

  • In the MEMS industry, systems for deep reactive-ion etching (DRIE) utilize fast pumping, fast-response mass-flow controllers inductive coupling of power, and heated chamber and pump lines that are critical to achieve reliable etch rates. In contrast, we have achieved 8:1 aspect-ratio PhC structures with 62nm vertica membrane walls using a standard reactive-ion etching process based on a sidewall passivation processes. In the remainder of this section we discuss this fabrication process.

    pdf16p quynho77 13-11-2012 41 0   Download

  • The term “CMOS MEMS” most often describes pro- cesses that create microstructures directly out of the metal/ dielectric interconnect stack in foundry CMOS. The metal- lization and dielectric layers, normally used for electrical interconnect, now serve a dual function as structural layers. For example, the suspended n-well of Figure 3(d) is consid- ered CMOS MEMS, since its beam suspension is made from the CMOS interconnect stack. There is significant motivation for making MEMS out of CMOS. Leveraging foundry CMOS for MEMS is fast, reliable, repeatable, and economical.

    pdf9p quynho77 13-11-2012 31 0   Download

  • Surface Acoustic Wave (SAW) devices are widely used in multitude of device concepts mainly in Micro Electro Mechanical Systems (MEMS) and communication electronics. As such, SAW based micro-sensors, actuators and communication electronic devices are well known applications of SAW technology. Due to their solid state design and fabrication compatible with other modern technologies such as Microwave Integrated Circuits (MIC), MEMS, (Charge Coupled Devices) CCD and integrated optic devices, SAW based sensors are considered to be extremely reliable....

    pdf0p 123859674 04-07-2012 71 11   Download

  • The miniaturization and performance improvement in semiconductor devices and integrated circuits (ICs) are expected to continue through leveraging of nanotechnologies and nanomaterials. This evolution should accelerate the System-on-a-Chip (SoC) trend, i.e., singlechip integration of multifunctional, mixed-signal electronic components, toward realizing embedded nanoelectronic systems.

    pdf0p 123859674 30-06-2012 115 23   Download

  • Microelectromechanical systems (MEMS) have played an increasingly important role in sensor and actuator applications. And its key contribution is that it has enabled the integration of multi-components (i.e., electronics, mechanics, fluidics and etc) on a single chip and their integration has positive effects upon performance, reliability and cost. Compared to conventional electrostatic, thermal or magnetic actuating schemes, piezoelectric MEMS inkjet has the advantages of lower power consumption, lower voltage operation and relatively larger driving force....

    pdf66p tieulaubau 21-06-2011 64 6   Download

  • Software Technology Software – at air interface, applications, protocol and network levels – is at the heart of the promise of software radio. At all levels the potential is vast and the implications are profound – the need for effective design tools to give functional reliability will be key to successful commercialization.

    pdf20p vaseline 30-08-2010 97 13   Download

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