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UV lithography

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  • Manipulating light by subwavelength resonators via plasmonic metasurface is currently studied intensively for various novel THz and optical applications. In this report, we present the fabrication of a simple plasmonic metasurface operating at infrared frequencies using the UV lithography and electron beam evaporation techniques.

    pdf5p viengland2711 23-07-2019 7 0   Download

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