CMP distribution

Digital PCR (dPCR) is a technique for estimating the concentration of a target nucleic acid by loading a sample into a large number of partitions, amplifying the target and using a fluorescent marker to identify which partitions contain the target.

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This paper proposes a novel view to predicting the distribution of pad cutting rate (PCR) and surface roughness based on cutting length and overlap cutting locus. The geometrical model of diamond dressing on the pad has been built and CMP tool parameters are used for the simulation of cutting length and overlap distribution. The distribution of PCR and predict surface roughness is calculated on each pad zone. Simulation results presented a high PCR and roughness is observed in center zones.

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NOT MEASUREMENT SENSITIVE MIL-HDBK-17-4 Volume 4 of 4 21 September 1999 DEPARTMENT OF DEFENSE HANDBOOK COMPOSITE MATERIALS HANDBOOK VOLUME 4. METAL MATRIX COMPOSITES This handbook is for guidance only. Do not cite this document as a requirement. AMSC N/A AREA CMPS DISTRIBUTION STATEMENT A. Approved for public release; distribution is unlimited. .MIL-HDBK-17-4 FOREWORD 1. This handbook is approved for use by all Departments and Agencies of the Department of Defense. 2. This handbook is for guidance only. This handbook cannot be cited as a requirement.

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