Electrostatic actuation

In this paper, vibration of Timoshenko microbeams with an axial force in microelectromechanical systems (MEMS) is studied for the first time by using a nonlinear finite element procedure. Based on the von Karm´ an geometric nonlinearity and the modified couple stress theory (MCST), a beam element is formulated by employing hierarchical functions to interpolate the displacement field.

17p viwolverine 11-07-2023 7 2   Download

The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined thirdorder shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are derived from Hamilton’s principle, and they are transferred to a discretized form using a two-node beam element.

13p viwolverine 11-07-2023 3 2   Download

This work reports a novel design of a micro gripper, in which V-shaped electrothermal actuators are used to create gripping force and a compliant mechanism is integrated to amplify displacements of the actuators. The gripper is designed to handle micro samples of various sizes from 5 m to 50 m by applying appropriate driving voltages. Those voltages are ranged from 5 V to 25 V, which are relatively low in comparison with driving voltages of the electrostatic micro grippers. The compliant mechanism with amplifying ratio 5.

6p cothumenhmong11 10-05-2021 24 2   Download

In this paper, we report on design and simulation of a scanning probe micro-cantilever. The micro-cantilever consists of a sharp silicon tip integrated at the free end of the silicon fixed-free beam. The micro-cantilever is driven electrostatically using parallel plate capacitive-type actuation.

5p vineji2711 19-05-2020 18 0   Download

A new method determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (i.e. in ydirection) is proposed, thence the differential motion equation of shuttle is established and solved to achieve a typical displacement formula.

10p danhdanh11 09-01-2019 21 2   Download

This paper reports the design, fabrication and characterization process of the trapezoidal Electrostatic Comb-drive Actuator (ECA) with the slope angle α = 2◦ . Together with the trapezoidal ones, the rectangular ECA with identical dimension was also designed and fabricated for comparison purpose. In order to reduce calculating deviation, the fringing effect was also taken into consider while carrying out theoretical analysis.

9p thienthanquydu 19-10-2018 34 0   Download

In this paper, we design and simulate a micro-suspension based scanning probe for nanolithography using electrostatic actuation. The probe consists of a square plate with a pyramid tip at the center that is suspended by four beams. The entire probe is assumed to be made of single silicon and operated in air medium. Operation characteristics are analyzed by finite element method.

10p cumeo4000 01-08-2018 26 0   Download

Bài báo trình bày công việc thiết kế và chế tạo hệ thống mini-robot (MRS) dùng để di chuyển micro-container thông qua cơ cấu thanh răng cóc và cơ cấu kích hoạt tĩnh điện kiểu răng lược (electrostatic comb actuator). Các mô đun của MRS có kích thước 6x6 mm2 được chế tạo bởi công nghệ Vi Cơ Điện tử (MEMS), có thể được lắp ghép để tạo thành một hệ vận tải hoàn chỉnh sử dụng cho nhiều mục đích khác nhau như hệ phân tích tổng hợp micro (m-TAS) để vận chuyển và phân loại các vật mẫu có kích thước micromét. Các...

6p tuanlocmuido 13-12-2012 279 66   Download

Microelectromechanical systems (MEMS) have played an increasingly important role in sensor and actuator applications. And its key contribution is that it has enabled the integration of multi-components (i.e., electronics, mechanics, fluidics and etc) on a single chip and their integration has positive effects upon performance, reliability and cost. Compared to conventional electrostatic, thermal or magnetic actuating schemes, piezoelectric MEMS inkjet has the advantages of lower power consumption, lower voltage operation and relatively larger driving force....

66p tieulaubau 21-06-2011 67 6   Download