Increasing mean free path
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Lecture ECE 6450 Microelectronic - Chapter 11: Etching techniques. After studying this section will help you understand Anisotropy can depend on mean Increasing Mean Free Path free path, or on DC plasma bias. Increasing mean free path (generally) increases anisotropy. Increasing DC bias (generally) increases anisotropy.
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trollhunters
10-01-2022
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The increasing demand on ultra miniturized electronic devices for ever improving performances has led to the necessity of a deep and detailed understanding of the mathematical theory of charge transport in semiconductors.
151p thix1minh
16-10-2012
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