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Spectroscopic ellipsometer
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Results of this investigation have been correlated with the films structural and optical properties. Among the structural properties, surface roughness and morphology, and crystalline quality of the films have been obtained by using the XRD and AFM methods. Additionally, optical properties such as band gap tune-ability and dielectric constant have been determined by spectroscopic ellipsometer.
7p
viberbers
09-08-2023
4
3
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This study explores the conditions necessary for low temperature fabrication of Al2O3 thin films by the ALD technique. Properties of the Al2O3 thin films were anlysised by variable-angle spectroscopic ellipsometer (VASE) and X-ray photoemission spectroscopy(XPS).
4p
trangcham1896
10-12-2018
39
1
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