Cảm biến áp suất MEMS silicon cho không gian (Thanh Huyền)

THE G I 6 I CAM BIEN<br /> <br /> <br /> Cam bien ap suat<br /> EMS silicon<br /> cho khdng gian<br /> am bien ap suiit mdi MEMs daa tren ap dien trd silicon, Idp nhdm. Hinh dang mat eat eiia dien trd pho bien ap dien trd<br /> <br /> <br /> <br /> C dadc phat trien de do tii" 20Bar tdi tren lOOOBar cho<br /> nhang iing dung chuyen ddng trong khdng gian. Phan<br /> tir silicon ed dang dng vdi vj tri ngoai va cau dien trd dadc<br /> md rpng vdi tinh dn djnh cao de phat hien ap suiit do iing suat<br /> mang lai, da dapc xay dang bdi chuan edng nghe silicon phang<br /> trong hinh l.b<br /> <br /> 3. Dang cua phan tu' cam bien<br /> Cam bien ed trien vpng bdi ed su" khac biet cac thupc ti'nh quan<br /> trpng vi khoang each va kich thadc nhd, tinh chat cufng ciia kim<br /> va qua trinh rieng MEMs, nha la lien ket ndng chay silicon va thuat loai cao va tin hieu dau ra Idn. Op nhay nam trong khoang<br /> khac dien tir.<br /> Cam bien tren ed trien vpng u'ng dung trong ITnh vi/c gia edng<br /> thd. LTU diem eiia nd la ed sa khac biet cac thupc tinh quan trpng<br /> nha kich thadc va khoang each nhd, miic dp ciing ciia kim loai,<br /> true ddi xiTng, tin hieu dau ra Idn, dap irng nhiet dp va ap suiit<br /> nhanh, nhay gia tdc thap. Hieu irng tre cung da dadc giam thieu<br /> bang each loai bd vd gay ra irng suiit bdi khoang each Idn g\da<br /> viing cam nhan va viing chet, hoan toan chinh xae trong pham vi<br /> ap suiit 700bar va dai nhiet dp tir -70C tdi 1350C la hdn 0,01%FS.<br /> Dae diem tre va lap lai dadc do tdi ±10 ppm.<br /> 0 100 200 300 400 500 600 700<br /> 1. Gidi thieu. Pressure fbarl<br /> Nha san xuat Presens tap trung chinh vao cdng nghiep hoa Hinh 2: Sal sd ap suit ap dung cho ap suat va nhiet do khac nhau<br /> phii hpp cho nhang u'ng dung cho ap suiit trung binh va cao nha<br /> ap suat dau va gas cd yeu cau ve dp chinh xae, dn djnh lau dai va<br /> khirdd rung. lOpV/V/bar tdi ImV/V/bar. Dae trang dai tin hieu dau ra dapc<br /> chpn trong dai 50mV/V do von sii'c manh tir nhieu dien.<br /> 2. Cong nghe Silicon Tin hieu ap suiit dadc bii them bdi ciing do mot nhiet dp trong<br /> Nguyen tac do ladng dadc khai thac bdi Presens bao gom sa ciing mot luc cau dien trd, dau do trong thdi gian cac ki ngan cho<br /> hdp nhiit cau dien trd ben ngoai tren mot cau triic silicon dang nhiet dp bii khdng dd'i eiia ap suiit ra. Hoan toan chinh xae cho<br /> dng. pham vi ap suiit 700bar va nhiet dp tir tir -70C tdi 1350C la hdn<br /> Cho mot dng thang irng suiit theo hadng ngang se cao giip 0,01%FS. Dae diem tre va lap lai cho pham vi ap suat 700bar<br /> ddi hadng true. Sa khac biet irng suiit gitTa hai phadng se tadng trong yeu cau ±10 mbar ( < ±10 ppm). Cam ket dadc do khoang<br /> ang vdi ap suiit va cd the dapc do ladng bdi ap dien trd ciia cau ± Imbar ( 1-2 ppm).<br /> dien trd. Khi tac dung ap li/e ben ngoai den phan tir dng la de do Khoang each Idn tadng ddi ciia 3-4mm tir viing chet tdi viing<br /> Ling suiit nen luon chdng lai nhang ap li/c gay ha hai. cam nhan giam tdi miic tdi thieu kich thadc vd dem lai iing suat<br /> Phan tir cam bien dapc che tao bdi tieu chuan edng nghe mat so vdi silicon cam bien thdng thadng, khoang each dd cd the theo<br /> phang silicon va tieu chuan qua trinh gia cdng kich thadc nhd, thir ta nhd hdn 10 Ian. Viec ddng gdi gay ra u'ng suiit la nhan to<br /> gidng nha hdn hdp lien ket silicon va khac dien hoa. Cau dien trd quan trpng tao ra dp t r i va so lech lau dai.<br /> dapc che tao bdi mot Idp epitaxial silicon va ket ndi dien vdi chuan Anh hadng chinh trong qua trinh lam viec cam bien ap suat<br /> <br /> <br /> External pressure Diffused resistors<br /> <br /> <br /> Wire bond & Metal contact<br /> die attach<br /> <br /> <br /> <br /> <br /> Buried Contact<br /> resistor diffuston<br /> <br /> <br /> (a) (b)<br /> Hinh 1: a. Cam bien hdp nhat va phan tir cam bien silicon dang ong, b, mat eat ngang cau dien trd<br /> <br /> <br /> 40| T U O O N G HOA NGAY NAY • (So 114 - 4/2010)<br />  J"HE G I 6 I CAM BIEN<br /> <br /> <br /> <br /> <br /> \i:<br /> vdi dieu kien ITnh vac gia cdng thd la tir gia tdc va nhiet dp trong<br /> Potting material steel or ceramics<br /> thdi gian ngan. Dae diem sai lech trong thdi gian ngan tai housing body<br /> 7500C/min khi dim cam bien vao trong nadc da da do dadc Resistors<br /> khoang 0,2bar, gia toe cam nhan da dadc tinh toan va do dac<br /> Au-wire<br /> trong yeu cau Imbar/g.<br /> ^<br /> Dae diem nay cho phep dp chinh xae cao trong dieu kien<br /> dong, dieu dd la can thiet de duy trinh dp chinh xae ciia phdng ^ > \ ^ " Qrcuit or flexprint<br /> thi nghiem trong dieu kien ITnh vac gia cdng thd. Sensitive part with ^ ^ ^ ^ ^<br /> Tinh on djnh lau dai trong mdi tradng gia cdng thd da dadc surface ^^^^^^^^^^^^^^^^^^H<br /> phan tich bang viec so sanh dau ra cam bien tir hai ap suiit giong<br /> Hinh 5 : Ddng gdi vdi kich thadc nhd<br /> nhau va nhiet dp cam bien dadc dat ciing mot vj tri trong dau.<br /> Viec so sanh dau ra cam bien da dadc thac hien khoang 3 nam<br /> 4. V6<br /> _. - Ui . . ^ 4.1 Mdi tru'dng du'dc each ly v6<br /> ! Kim loai vd cam bien ro rang cd riit nhieu iing dung. Vd cam<br /> II....<br /> bien dadc lam t i i titanium va thep nguyen chiit ed chiit lapng.<br /> Cam bien khdng gian, phan tir cam nhan dapc bpc trong vd<br /> .0......<br /> .fl.A. ._ . / 5 titanium bang each han tia electron. Trong dieu kien dien ap cao<br /> t<br /> <br /> fi:. ._ .._/ J... .<br /> 1 . ._. ^T^!^"",j'^Sai<br /> - .. 1 >*&<br /> [~-Vy;+- '^•""^s*^ thiiy tinh kim loai xuyen qua Io giCia khoang phan tir cam bien<br /> . „ „ . „ .<br /> <br /> f^ dadc gay ap suiit cao va phan mach dapc ghep. Phan ta cam<br /> ^.. „„.j<br /> SmH<br /> 1 _ _ _ _ _ _t —<br /> bien dadc gan bang each dinh vao khdi day lien ket khdng nhay<br /> 11 09 2C0} to 16 09.2(03<br /> cam. Va ket ndi dien dapc thdc hien bang day lien ket.<br /> Hinh 3: Viing dn dinh Phan tir cam bien dadc bao ve bdi viing ma viing dd dadc tao<br /> ra do mang ngan chia lam 2 ph'an trong ciing mot liie sa an mdn<br /> kim loai. Mang phan chia dadc han thanh vd sir dung ky thuat han<br /> sau trong dieu kien lap dat ap suiit va nhiet dp tiep xiic gidng het<br /> EB. Cuoi ciing, Io hong cam bien dapc dien day bang silicon Idng<br /> nhau. Ap suat thay dd'i trong gidi han nhd hdn 0,05bar dadc chi<br /> <br /> <br /> <br /> <br /> Hinh 4: Hinh 6: Phan tir cam nhan<br /> <br /> va dapc bjt kin bang mot bi dapc han dien trd. Giam ap liie tren<br /> ra trong hinh 3. Tir cupc kiem tra dd, tinh on djnh dai han dapc mang ngan dadc gidi ban tdi 50ppm ciia ap suiit dapc ap dung,<br /> adc lapng khoang ± 0,003%FS/nam. ap suat bj khir bdi dieu chinh trong liic bii. Nhin mot mat cat<br /> <br /> <br /> <br /> 26-fiQV input -if«nJitwnmie *<br /> T<br /> BriiJgi!<br /> I Condi b m ing<br /> <br /> <br /> v*_i_<br /> <br /> vt r<br /> -5 Dini'rvruiiJ<br /> II to<br /> singjj Ended |il ¥1<br /> \i n_<br /> Vsn"<br /> <br /> <br /> <br /> <br /> (a) (b)<br /> Hinh 7: a, Giao dien mach tWdng tit. b, Giao dien mach so<br /> <br /> (S6 1 1 4 - 4 / 2 0 1 0 ) - < T i ; OONG HOA NGAY NAY 41<br /> ii:i^Hr«iicAMBiEN<br /> <br /> <br /> ngang ciia viing da tach khdi vd dddc chi hinh 7 cho phep do ladng chinh xae ciia Cac sd do khoi eiia ASIC giao dien ky<br /> ra trong hinh sd 4 cam bien dien ap ra c'au va td'ng trd cau, thuat sd dadc the hien trong hinh 7b. No<br /> Td'ng trpng lapng cam bien trong cam ca hai bien dd'i vdi tirng ap suiit va nhiet bao gom cac bp don kenh tadng ta, mot<br /> bien khdng gian yeu cau 125gran. Phan dp. sa phdi hdp khuyech dai thiet bj do bd ADC 14 bit va giao dien sd song song<br /> mach ghep dapc bit kin, va giao dien dien thdng thadng vdi dieu bien eiia phan tin hoac ndi tiep. Dien ap vao khac nhau Vs<br /> la do ket ndi kin theo yeu cau ESA. Cam hieu cau dapc sir dung cho sd on djnh va Vr dadc chuyen thanh mot dien ap cuoi<br /> bien ap suiit khdng gian hoan thanh dapc cao. ciing mot each lien tuc va dadc so hoac<br /> bieu dien trong hinh 4b Anh hadng nhiet dp tin hieu ap suiit la thong qua ADC. Dien ap tham chieu cau<br /> 4.2 Cam bien du'dng kinh nhd yeu c'au d'au tien dapc bii bang each sir cd gia trj cao hdn tir nang ladng nguon<br /> De bao ve nhang irng dung chat Idng dung kich thich ddng dien khdng dd'i. cap.<br /> trd ciia phan tir cam bien cd the dapc loai Mang dien trd mang mdng dadc bao gom Vdi cam bien nay da tao nen mot cuoc<br /> bd dan tdi mot quan diem thay the vd bii cae phiin tir cam bien rieng va cam bien canh tranh ve tang dp chinh xae, giam kich<br /> dadc cac phan tir silicon dang dng ed the dp nhay bien dd'i. thadc, trong ladng va tiet kiem nang<br /> dadc sir dung nha dien thong qua tri/c Yeu c'au dat dp chinh xae cao, tien ladng tai chau Au. Cam bien ap suit Pre-<br /> tiep. trinh them vao va bii nhiet dp la can thiet sens se dadc san xuat 100% tai chau Au,<br /> Nhang quan niem vd thay the la daa trong phan mem he thdng ngoai. Tin hieu gidi thieu bp don kenh vdi diiu vao tadng<br /> tren gan ph'an tir silicon dang dng vao mot ra cam bien la 0-5V. Td'ng sd chinh xae cho ti/cd kha nang gom nhieu hdn (2-3) phan<br /> cai Io tren vach ngan vd thep nha dadc chi earn bien hoan thanh la hdn 0,1%FS. tir cam nhan de dam bao yeu cau SLT du'<br /> ra d hinh 5. Lo kim loai dac biet phu thupc Yeu td chinh hdp thanh dadc sir dung thira.<br /> vao irng dung, nhang thiiy tinh hoac trong nguyen mau.<br /> epoxy ditdc cho la thich hpp. - sa chinh xae mang dien trd va mang 6. Ket luan<br /> Mau dau tien ciia ph'an tir cam bien dien trd Dp chinh xae cao cam bien ap suat ap<br /> MEMs silicon thiiy tinh lam ndng chay vao - sa chinh xae qua trinh khuyech dai dien trd da phat trien thanh cdng viec sii<br /> kim loai ciing dadc chi ra trong hinh 6. - CMOS switch (Intersil HI9P303-P) dung cae tieu chuan ap dien trd. Do nhu'ng<br /> Dadng kinh kim loai cu'ng la 5mm va chieu - Dieu khien tuyen tinh(National dac diem quan trpng nha tin hieu dau ra<br /> dai day dii 7mm, cho phep kich thadc nhd LM117H) Idn, gia tdc cam nhan thap, dap iing ap<br /> va gpn tich hpp eiia cam bien vao he - Nguon MOSFET (Intersil IRFF9130) suat va nhiet dp nhanh, va kha nang qua<br /> thdng. Sd dd cat ngang ciia cam bien day 5.2. Giao dien mach so tai, cam bien dd se ed kha nang duy tri dp<br /> dii vdi thiiy tinh dadc bit kin dapc chi ra sa phat trien eiia ASIC sd (mach tich chinh xae trong phdng thi nghiem vao ITnii<br /> trong hinh 6b. Viec lap rap cac chi tiet cd hpp irng dung rieng) da bat dau khi cd sa vac thd. Ngoai ra, vdi cac iing dung<br /> the han vao Id ap suat bang cdng nghe gia tang san vat, dadc thiic day bdi trpng chuyen ddng trong khdng gian la cac moi<br /> han tia electron, laser hoac dien trd. Toan ladng va kich thadc nhd, cai thien chadng han trong ciiu triie vd titanium va giai phap<br /> bp khdi lapng bat d'au nhd hdn 30gram, trinh, cai thien dp chinh xae, cai thien eac mach trong dieu kien ghep tadng ta. Cong<br /> phu thupc thac te cau hinh mach. san pha'm logic do cae thanh phan it hdn. nghe nay dang dadc tiep tue vdi mot cupc<br /> Sa phat trien dp chinh xae cao, giao tham dinh cao tien tdi qua trinh che tao ra<br /> 5. Mach dien mach cam bien sd khd phat xa dadc mot san pham chiit ladng cho nganh cong<br /> 5.1. Giao dien mach tiTdng tiT. daa tren t'on tai td hdp tin hieu be mat nghiep vu tru.<br /> Cam bien bao gom mot mach ghep cam bien. Nhiem vu chinh ciia ngadi thiet THANH HUYEN<br /> cho irng dung va xae djnh chadng trinh cu ke la tang hieu qua phan giai len 14bit Theo: https://esdes.org<br /> the. Sd dd 2 loai mach nha chi ra trong khdng anh hadng giam phat xa.<br /> <br /> <br /> <br /> <br /> XYR 6000, SENSOR DO VI TRI CUA HONEYWELL<br /> ed the diing de theo ddi eac van trong diing trong rat nhieu u'ng dung khac nhau:<br /> nhieu kieu iing dung khac nhau, dac biet xae dinh vj tri, dieu khien van, chi thj miic<br /> la trong cae khu vi/e nguy hiem hoac eac trong cac tank....<br /> khu VI/C each xa phdng dieu khien, ndi ma<br /> dieu khien tir xa luon la mot sa laa chpn Nhu'ng u'u diem chinh ciia XYR<br /> ed tinh au tien. 6000 CO the ke den:<br /> XYR 6000 hoat ddng di/a tren cac thiet • Hoat ddng tin cay<br /> bj chuyen mach chuyen diing trong cac • Cd dp an toan cao<br /> khu vi/c nguy hiem, dd la cac thiet bi • Cd the sir dung trong cac khu vi/c<br /> MICRO SWITCH CX eiia Honeywell. Cac nguy hiem<br /> thiet bj nay da dadc sir dung kha pho bien • Hieu suiit sir dung cao<br /> va da chiem dadc Idng tin eiia khach hang • Gia thanh san pha'm hdp ly<br /> trong hdn 40 nam qua. Bang each ket hdp Oe biet them thdng tin chi tiet ve san<br /> cac chiic nang da dadc kiem chiing pham nay, cd the xem tai website ciia<br /> San pha'm mdi ciia Honeywell cho nghiem ngat eiia cdng nghe MICRO Honeywell<br /> phep giam sat vj tri eiia cac van tir xa vdi SWITCH vdi mot mot he thdng mang tin B.O.T (Theo www.honeywell.com)<br /> dp tin cay cao. Theo nha san xuat, thiet bj cay OneWireless, XYR 6000 ed the dadc<br /> <br /> <br /> 42| TU BONG HOA NGAY NAY •• (So 114 - 4/2010)<br />