Metal organic CVD
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Lecture ECE 6450 Microelectronic - Chapter 13: Thin film deposition and epitaxy (Chemical vapor deposition, metal organic CVD and molecular beam epitaxy). After studying this section will help you understand chemical gas sources are thermally, optically, or electrically (plasma) reacted with a surface to “leave” behind deposits with reaction byproducts pumped out of the reaction tube or vacuum chamber.
43p 
trollhunters
10-01-2022
8
0
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(bq) part 2 book "modern physical organic chemistry" has contents: inverse phase transfer catalysis in organic synthesis, solubilization of carbon nanotubes in water, thin cvd diamond films – synthesis, properties, applications, functional polymers forming complexes with metal ions,...and other contents.
199p bautroibinhyen20
06-03-2017
53
4
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