Lecture ECE 6450 Microelectronic - Chapter 13&14: Thin film deposition and epitaxy (Chemical vapor deposition, metal organic CVD and molecular beam epitaxy)

Lecture ECE 6450 Microelectronic - Chapter 13: Thin film deposition and epitaxy (Chemical vapor deposition, metal organic CVD and molecular beam epitaxy). After studying this section will help you understand chemical gas sources are thermally, optically, or electrically (plasma) reacted with a surface to “leave” behind deposits with reaction byproducts pumped out of the reaction tube or vacuum chamber.