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Lecture ECE 6450 Microelectronic - Chapter 3: Diffusion
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Lecture ECE 6450 Microelectronic - Chapter 3: Diffusion. After studying this section will help you understand chemical source in a vapor at high temperature. Doped oxide source (either deposited at high temperature or as a “Spin on polymer). Diffusion/annealing from an Ion implanted source.
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