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Oxide charge evolution under crystallization of amorphous Li–Nb–O films
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Despite the important role being played by the oxide charge in ferroelectric memories the origin and distribution of this charge in LN-based heterostructures during the crystallization of LN films are not clear yet. The present work is aimed to investigate how the oxide charge evolves during the crystallization of amorphous LieNbeO films deposited onto Si substrates.
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