Direct control of Pt film orientation for growth of (100)-oriented PZT films

We investigated highly (100)-oriented PZT films directly grown on Pt films coated on RuO2/SiO2/Si substrates via sputtering method. By controlling the preferred (100) orientation volume of the Pt films, we confirmed the effectiveness of high (100) orientation of Pt films suitable for the growth of highly (100)-oriented PZT films.